Showing 120 of 120on this page. Filters & sort apply to loaded results; URL updates for sharing.120 of 120 on this page
Thermal atomic layer etching of HfO2 using HF for fluorination and ...
Figure 1 from Mechanisms for plasma etching of HfO2 gate stacks with Si ...
(PDF) Origin of Enhanced Thermal Atomic Layer Etching of Amorphous HfO2
Figure 11 from Mechanisms for plasma etching of HfO2 gate stacks with ...
XPS surface analyses of a) blanket HfO2 surfaces prior etching b) after ...
Wet Chemical Etching of Zn-Containing Oxide and HfO2 Films - IOPscience
Figure 13 from Atomic Layer Etching of HfO2 Using Sequential, Self ...
Atomic Layer Etching of HfO2 and ZrO2 Using NbF5 and TiCl4 in High ...
(PDF) Atomic Layer Etching of HfO2 Using Sequential, Self-Limiting ...
(PDF) Selective Etching of HfO2 by Using Inductively-Coupled Ar/C4F8 ...
Figure 1 from Selective Dry Etching of HfO2 in CF4, Cl2 and HBr Based ...
(PDF) Freestanding HfO2 grating fabricated by fast atom beam etching
Atomic Layer Etching of HfO2 Using Sequential, Self-Limiting Thermal ...
Mechanisms for plasma etching of HfO2 gate stacks with Si selectivity ...
Figure 12 from Mechanisms for plasma etching of HfO2 gate stacks with ...
Figure 4 from Mechanisms for plasma etching of HfO2 gate stacks with Si ...
Halogen‐Free Anisotropic Atomic‐Layer Etching of HfO2 at Room ...
Figure 1 from Selective etching of high-k HfO2 films over Si in ...
Figure 1 from On the etching characteristics and mechanisms of HfO2 ...
Figure 2 from Selective etching of high-k HfO2 films over Si in ...
Figure 1 from Atomic Layer Etching of HfO2 Using Sequential, Self ...
(PDF) Selective atomic layer etching of HfO2 over silicon by precursor ...
Kinetics of HfO2 etching and impurity elimination with atomic hydrogen ...
(PDF) Plasma etching of HfO2 in metal gate CMOS devices
Ion-radical synergy in HfO2 etching studied with a XeF2/Ar+ beam setup ...
High-selectivity dry etching method for HfO2 thin film - Eureka | Patsnap
Mechanisms and selectivity for etching of HfO2 and Si in BCl3 plasmas ...
Nagoya University achieves world first anisotropic atomic-layer etching ...
Figure 1 from Origin of Enhanced Thermal Atomic Layer Etching of ...
HfO2 etch rates as a function of plasma composition in CF4/Ar and ...
HfO2 etch rates as a function of rf chuck power in 10CF4/5Ar and ...
TEM micrographs of InAs/HfO2 core–shell NWs after wet chemical etching ...
SEM images of fabricated freestanding HfO2 grating. (a) cross section ...
Figure 1 from Freestanding HfO2 resonant grating fabricated by ion beam ...
(PDF) Etching mechanisms of HfO2, SiO2, and poly-Si substrates in BCl3 ...
Materials Project Hfo2 at Mark Lenhardt blog
Fabrication process of freestanding HfO2 grating. | Download Scientific ...
(PDF) Fabrication of HfO2 patterns by laser interference ...
Self-Limiting Temperature Window for Thermal Atomic Layer Etching of ...
(a,b). TEM cross-sectional images of released coaxial HfO2 nanotube ...
Figure 1 from Precise Depth Control and Low-Damage Atomic-Layer Etching ...
Etching effect of HF acid on Bi2O2Se. a) Schematic of normal transfer ...
Enhanced Operational Characteristics Attained by Applying HfO2 as ...
Thermal Atomic Layer Etching of Al2O3, HfO2, and ZrO2 Using Sequential ...
Figure 3 from Precise Depth Control and Low-Damage Atomic-Layer Etching ...
(PDF) Dry etching of TaN/HfO2 gate stack structure by Cl 2/SF6/Ar ...
Controlling the crystallinity of HfO2 thin film using the surface ...
Dry etching of TaN∕HfO2 gate-stack structure in BCl3∕Ar∕O2 inductively ...
Pdf Selective And Deep Plasma Etching Of Sio2
High Driving Current Selector Based on As-Implanted HfO2 Thin Film for ...
Nanopore fabricated in pyramidal HfO2 film by dielectric breakdown ...
Nucleation and Growth of the HfO2 Dielectric Layer for Graphene-Based ...
SEM images of fabricated freestanding HfO2 nanostructures. (a) SEM ...
XPS spectra of Hf 4f (a) and O 1s (b) for HfOx/HfO2 layers etched at ...
Etch rates of TaN and HfO 2 , etch selectivity of the TaN layer to the ...
Etch rate uniformity of HfO 2 , poly-Si b, and SiO 2 in BCl 3 plasmas ...
XPS depth profiles of HfO 2 /TiO 2 /HfO 2 on Pt-and TiN-coated Si by Ar ...
Etch rates of the TaN and HfO 2 layers and TaN/HfO 2 etch selectivity ...
Etch rates of TaN and HfO 2 and etch selectivity of the TaN layer with ...
(a) Etch rates of the TaN and HfO 2 layers as a function of the dc ...
Review and perspective on ferroelectric HfO2-based thin films for ...
VD-ID characteristics of HfO2-nMOSFETs fabricated before and after O2 ...
Etch depth (Å) and etch rate (Å/cycle) of InGaAs, Si, SiO2, HfO2, PR ...
Process sequence for the AlGaN/GaN-based Ω-shaped-gate FinFET. (a ...
Characterization of plasma-induced damage on TiN/HfO2/SiO2 stacked ...
Hafnium oxide: A thin film dielectric with controllable etch resistance ...
b: Sub 20 nm trenches etched in HBr/O 2 STI etch processes using a ...
Effects of N2, O2, and Ar plasma treatments on the removal of ...
a) 3D view and b) cross‐section view of a floating‐gate MoS2‐based ...
(Digital Presentation) High Performance Back-Channel-Etch Igzo TFT with ...
